RF > Scanning Probe Microscope (SPM)

Scanning probe microscopy (SPM) covers several related technologies for imaging and SPM measuring surfaces on a fine scale, down to the level of molecules and groups of atoms. SPM machine also can be utilized for lithographic technique, known as Scanning Probe Lithography (SPL), in which a microscopic or nanoscopic stylus is moved mechanically across a surface to form a pattern. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. Contact Dr Sabar D. Hutagalung. Email: mrsabar@eng.usm.my. Tel: 045996171, Electronic Materials Laboratory, School of Materials and Mineral Resources. Engineering, USM Engineering Campus, 14300 Nibong Tebal, Penang.

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